Femtosecond Laser Micromachining: Current Status and Applications
نویسنده
چکیده
Femtosecond lasers currently show much promise as potential sources of choice in a number of laser micromachining applications, including biomedicine, photonics and semiconductors. The status of micromachining with femtosecond pulses is reviewed for a variety of materials and a comparison made with other solid-state lasers. An outlook for developments in this area is presented.
منابع مشابه
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تاریخ انتشار 2002